Energy Dispersive X-ray Spectroscopy (EDX or EDS) is used with SEM to identify the elements, to determine the elemental composition, and to image the elemental distribution in a particular area or point of interest by mapping.
O
Mn
Cu
Al
Si
Totals
19.88
62.38
16.21
0.91
0.62
100.00
46.33
42.21
9.49
1.19
0.78
100.00
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