Energy Dispersive X-ray Spectroscopy - EDX



Element Weight% Atomic%

O 19.88 46.33
Mn 62.38 42.21
Cu 16.21 9.49
Al 0.91 1.19
Si 0.62 0.78
Totals 100.00 100.00
Energy Dispersive X-ray Spectroscopy (EDX or EDS) is used with SEM to identify the elements, to determine the elemental composition and to image the elemental distribution in a particular area or point of interest by mapping.


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